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Silicon VLSI Technology: Fundamentals, Practice, and Modeling, 1/e


Silicon VLSI Technology: Fundamentals, Practice, and Modeling, 1/e
Author(s)  James D. Plummer, Peter B. Griffin and Michael D. Deal
ISBN  9788131726044
Imprint  Pearson Education
Copyright  2009
Pages  817
Binding  Paperback
List Price  Rs. 1365.00
  
 
 

Unique in approach, this text provides an integrated view of silicon technology—with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies.
  • Contents
  • Features
  • Downloadable Resources

  1. Introduction and Historical Perspective.

  2. Modern CMOS Technology.

  3. Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers.
  4. Semiconductor Manufacturing— Clean Rooms, Wafer Cleaning and Gettering.
  5. Lithography.

  6. Thermal Oxidation and the Si/SiO2 Interface.

  7. Dopant Diffusion.

  8. Ion Implantation.

  9. Thin Film Deposition.

  10. Etching.

  11. Backend Technology.
 

  • Extensive use of modern computer simulation methods and examples—Integrated into each chapter.
  • Early, broad exposure to a complete chip manufacturing process.
  • Examples of modern manufacturing practice.

  • Historical perspective and introduction.

  • An integrated view of silicon technology—with an emphasis on modern computer simulation.
 
Instructor Resources
 


 
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